Dielectric constant measurement of thin films by differential time-domain spectroscopy

نویسندگان

  • Zhiping Jiang
  • Ming Li
  • X.-C. Zhang
چکیده

We present a theoretical model and preliminary experimental results on the dielectric constant measurement of thin films by using differential time-domain spectroscopy. This technique greatly reduces the minimum measurable thickness, and it promises the dielectric constant measurement of mm-thick thin films with the frequency range from GHz to THz. © 2000 American Institute of Physics. @S0003-6951~00!03922-X#

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تاریخ انتشار 2000